| 摘要 |
PROBLEM TO BE SOLVED: To decide whether the defect generated on the surface of a substrate is the defect that arises from the defect existing on a prescribed pattern or not, in the substrate which is manufactured so that a repeated pattern is transferred on the major surface. SOLUTION: A plurality of substrates in which a prescribed pattern is transferred are manufactured using an injection molding device for transferring a stamper on which the prescribed pattern is formed, by performing the step of manufacturing the disk substrates one after another. After the formation of magnetic films on the plural disk substrate, the defects existing on the surfaces of the disks 1, 2, and 3 are detected, and the fixed defects 4 existing at approximately the same positions each other are extracted by the detection result of the defects existing on the major surfaces of the three disks 1, 2, and 3, respectively. The fixed defects 4 are separated from random defects 1b, 2b, and 3b, on each of the major surfaces of the disks 1, 2, and 3, by extracting the fixed defects 4 from each of the disks 1, 2, and 3.
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