MANUFACTURING METHOD OF ELECTRON EMISSION ELEMENT, ELECTRON SOURCE AND IMAGING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide novel manufacturing methods of a surface conduction type electron emission element having high efficiency, an electron source and an imaging device. SOLUTION: The manufacturing method is used for manufacturing an electron emission element, having a conductive film including an electron emission part between facing electrodes. The manufacturing method of the electron emission element is characterized in that a deposit, containing carbon as the main constituent is deposited by applying a pulse voltage to the conductive film formed between the electrodes in an activation process of the element.