| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a getter which has not a conventional ring-like container but a plurality of exposed faces, and then can be compact and simple in structure, and also easily manufactured and bonded with ultrasonic. SOLUTION: A getter material 21 has a metal frame 311 around it and exposed faces facing an anode substrate 111 and a front substrate 112, and is supported by a metal leg 312 in the air and formed by pressing the metal frame 311 and getter material powder together. The inner surfaces of the anode substrate 111 and the front substrate 112 are irradiated with a laser from the outside so as to form getter mirror films on them, and also the end portion 313 of a metal leg 312 is capable of being fixed on a metal layer 41 of the anode substrate 111 by ultrasonic bonding.</p> |
