| 发明名称 |
POSITION MEASURING DEVICE AND ALIGNER |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To facilitate handling and adjusting work related to maintenance and shipping. SOLUTION: A measuring part 31 measures the position information for a substrate held on a movable stage 14. A surface table 12 supporting the stage 14 for free movement supports the measuring part 31.</p> |
| 申请公布号 |
JP2003007804(A) |
申请公布日期 |
2003.01.10 |
| 申请号 |
JP20010187028 |
申请日期 |
2001.06.20 |
| 申请人 |
NIKON CORP |
发明人 |
IMAI MOTOMASA;MIYAGAWA TOMOKI;TATSUZONO HISATAKA |
| 分类号 |
G01B21/00;G03F7/20;H01L21/027;H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
G01B21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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