| 摘要 |
PURPOSE: An apparatus for changing a direction of a substrate having a shower function is provided to perform a shower function by installing a shower portion at an upper side of a processing bath. CONSTITUTION: A substrate direction change apparatus is installed at an intersection part between transfer conveyers. A processing bath is connected with the transfer conveyer. A center portion of a bottom plate(41) of the processing bath is projected to an upper side by an incline plane(43) and a stone plate(42). A drain pipe(44) is installed at a bottom plate(41) of the processing bath. A base plate(11) is installed at a rotary shaft(31) of an index driver(30) by using a support plate(32). A couple of support portions(12) are installed on the base plate(11). A couple of driving rollers(17) is inserted into a driving shaft(16). A driving motor(15) is connected with one side of the driving shaft(16). A driving helical gear(18) is installed at the other side of the driving shaft(16). A transfer shaft is installed at both sides of the driving shaft(16). Each transfer roller is installed at each transfer shaft. A matching helical gear is fixed to each transfer shaft. A helical gear screw(20) is installed at lower sides of the driving helical gear(18) and the matching helical gear. A variable guide is installed at each power side of the driving roller(17) and the transfer roller. A width change cylinder(22) is fixed on a lower side of the base plate(11) by using a bracket. An operating bracket is moved in a straight line by a guide portion(24).
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