| 摘要 |
PROBLEM TO BE SOLVED: To improve characteristics of a piezoelectric device having a piezoelectric element on a substrate by suppressing a deterioration of characteristics of the device itself caused by a fault of a connecting part of the substrate to the piezoelectric element and unevenness of reliability, in a constitution of the device having the element provided on the substrate and a method for manufacturing the same and to simplify manufacturing steps. SOLUTION: The method for manufacturing the piezoelectric device comprises the steps of forming grooves on the substrate, and casting a molten metal in the connecting part of the piezoelectric element to the substrate through the grooves to connect both the members. Thus, voids generated in a connecting layer are reduced, a connection having a high close contact strength is realized, and characteristics of the connected piezoelectric device are improved. |
