| 摘要 |
PROBLEM TO BE SOLVED: To realize a high-frequency plasma discharge apparatus, which is capable of improving a reaction product eliminating plasma discharge in efficiency and reducing gas consumption. SOLUTION: A plasma discharge tube (discharge tube) 11 is installed inside a reaction processing chamber 1, penetrating through the wall of the processing chamber 1. The discharge tube 11 is reduced in pressure through insulating dielectric tube active seed discharge capillaries 24 by reducing the reaction processing chamber 1 in pressure through evacuation, deposit-removing processing gas is introduced through a removing gas inlet 8, high-frequency power is supplied from a discharge tube high-frequency power source 12 to the discharge tube 11 via a power supply-side matching unit 13, an electric discharge occurs in the discharge tube 11 to turn the deposit removing gas into a plasma, gas decomposition active seeds are discharged out into the reaction processing chamber 1, the deposits are decomposed into volatile matter, and the volatile matter is evacuated through an evacuation system 6. |
