| 摘要 |
PROBLEM TO BE SOLVED: To provide a storing box for a semiconductor wafer in which the semiconductor wafer is not contaminated by organic gas produced inside the storing box. SOLUTION: The storing box 10 for the semiconductor wafer is formed of a polycarbonate resin, receiving the semiconductor wafer 14 in a horizontal state, and has a door 11 in the front. An air supply port 12 having piping joints and a filter to be connected to piping which supplies clean air or clean gas is made on top of the storing box 10. An air outlet 13 with a filter is made on bottom of the storing box 10. Dust and the organic gas which are adhered to a surface of the semiconductor wafer 14 received horizontally are reduced, by forcibly forming air stream which flows from the upper side to the lower side. |
