| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum treatment device improved so that at the time of a vacuum evacuation within a load lock chamber and at the time of venting, raised particles can be prevented from falling on treatment objects and from being adhered to the treatment objects. SOLUTION: A vacuum treatment device is provided with a load lock chamber 4 with the interior constituted so as to be able to exhaust in a vacuum and a vacuum treating chamber 2 for performing a prescribed treatment on treatment objects 6 which are carried from the chamber 4 into the chamber 2. A cassette 13 having a plurality of shelves for housing the objects 6 is provided within the chamber 4. Means 17 for vertically moving the objects 6 housed in the shelves in the interiors of the shelves are provided within the chamber 4. |
