SYSTEM FOR AUTOMATICALLY GENERATING SECS MESSAGE AND METHOD THEREFOR

摘要

PURPOSE: A system for automatically generating an SECS(Semiconductor Equipment Communication Standard) message is provided to define semiconductor manufacturing equipments and equipment servers, and to define an SECS message used for SECS communication between the equipments, then to combine the defined equipments and the servers with the message, thereby quickly implementing equipment automation by automatically generating an SECS message program source. CONSTITUTION: Many equipments(310-314) perform semiconductor manufacturing processes. Many EQSs(Equipment Servers)(320-324) perform SECS communication with the equipments(310-314) by defining equipment characteristics, process control names, and an SECS message, and automatically generating an SECS message source. An MES(Manufacture Execution System)(330) executes procedures and records on a manufacturing spot, and executes resource management. A database(340) stores data necessary for operating the MES(330). A shared database(350) stores the SECS message defined in the EQSs(320-324) and data inputted from the equipments(310-314).