| 摘要 |
PURPOSE: An apparatus for controlling temperature of developing solution in developing equipment is provided to check correctly the developing solution and confirm the checked temperature of the developing solution. CONSTITUTION: A developing apparatus(10) includes a developing solution supply portion(132), an injection nozzle(134), and a developing solution temperature controller. A supply tube(136) is used for connecting the developing solution supply portion(132) with the injection nozzle(134). The developing solution temperature controller is formed with a thermal sensor(142), a display portion(144), a control portion(146), an alarm generation portion(148), and a temperature sustain portion(150). The thermal sensor(142) is used for detecting temperature of the developing solution injected from the injection nozzle(134). The control portion(146) compares the detected temperature of the thermal sensor(142) with reference temperature and perform an interlocking operation or generates an alarm sound according to a compared result. The display portion(144) displays the detected temperature of the thermal sensor(142). The temperature sustain portion(150) sustains the temperature of the developing solution injected from the injection nozzle(134).
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