SUBSTRATE PROCESSING UNIT AND ITS AIR CONDITIONING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing unit and its air conditioning method in which controllability of humidity can be stabilized while contributing to energy saving. SOLUTION: Since a part of refrigerant of 60 deg.C-80 deg.C compressed by a compressor 58 is fed to a humidifier 60 and humidification is performed by generating steam with the heat of the refrigerant, power can be reduced as compared with a conventional case where pure water is heated only by means of a heater thus contributing to energy saving. Since the output from a heater 63 can be lowered, instability of humidity control can be eliminated.