| 摘要 |
PURPOSE: A shutter unit of stepper equipment is provided to prevent double exposure by restraining leakage of light due to a leak point of the shutter unit. CONSTITUTION: A lighting apparatus(32) is formed with a lamp(34), a focusing mirror(36), a shutter unit(38), and a reflective mirror(40). The lamp(34) is used for supplying light. The focusing mirror(36) is used for focusing the light of the lamp(34). The shutter unit(38) is formed with a shutter wing and a shutter motor. The shutter unit(38) is used for shutting selectively the focused light received from the focusing mirror(36). The reflective mirror(40) is used for reflecting the light to a predetermined direction in an opening state of the shutter unit(38). In the shutter unit(38), the leakage of the light due to a leak point is prevented by adhering a cover on the leak point.
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