| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a cassette for storing a glass substrate which can lower cleanliness both in a carrying route part and in a storing part of a clean room by preventing foreign matter floating in an ambience from adhering on the glass substrate at the time of storing and carrying, and can make the clean room volume smaller by installing the carrying route part and the storing part in the outside. SOLUTION: Side covers 4 are pivotally attached to side plates 12 by a pin 5 and a front cover is made to be rotatable, by installing the front cover 2 equipped for an opening 1a and an upper cover 3 which is connected being bendable to top of the front cover 2 and equipped along a top plate 11 of the cassette 1, and side covers 4 which are individually extendedly equipped along both the side plates 12 of the cassette 1 from both side parts of the front cover 2, and by forming upper parts 12a of the side plates 12 into circular shapes as well.</p> |
