发明名称 LASER DEVICE AND ALIGNER USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a laser device and an aligner using the same by which an ASE optical element or the like other than selected wavelengths can be controlled and reduced. SOLUTION: This laser device is provided with a laser resonator that generates a laser light including at least a first wavelength element and a second wavelength element, and a wavelength selection means that is arranged outside the laser resonator and emits in different directions the first and second wavelength elements included in the laser light that is generated by the laser resonator.
申请公布号 JP2003008122(A) 申请公布日期 2003.01.10
申请号 JP20010188354 申请日期 2001.06.21
申请人 GIGAPHOTON INC 发明人 WAKABAYASHI OSAMU;NAGAI SHINJI
分类号 G03F7/20;H01L21/027;H01S3/137;H01S3/225;(IPC1-7):H01S3/137 主分类号 G03F7/20
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