发明名称 METHOD OF MANUFACTURING STRUCTURE WITH MANY FINE PROJECTIONS ON SURFACE
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a structure with many fine projections on the surface, efficiently and very accurately, by means of an equipment of a relatively simple structure. SOLUTION: After a punch 20 is aligned in an XY plane, it is pushed into the surface of a first flat plate 1. By repeating this operation, with the location of the punch 20 changed sequently in the XY plane, many fine dents 2 are formed in the surface of the first flat plate 1. An electrocast layer 3 is formed on the first flat plate 1. A second flat plate 5 is pasted to the rear surface of the electrocast layer 3. The electrocast layer 3 is peeled off together with the second flat plate 5 from the front surface of the first flat plate 4, to obtain a mother die 6. The mother die 6 is pressed against a composite sheet 14a to transfer a pattern of the front surface of the electrocast layer 3 onto the surface of a rubber layer 12. The thus fabricated sheet-like plate 14 is filled with a paste 15, and then the paste 15 is hardened. The sheet-like plate 14 is pressed against a substrate 16 to transfer the paste 15 onto the surface of the substrate 16.
申请公布号 JP2003007747(A) 申请公布日期 2003.01.10
申请号 JP20010183775 申请日期 2001.06.18
申请人 TOSHIBA MACH CO LTD 发明人 HASEGAWA YUTAKA
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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