BUBBLE JET SHOWER MODULE FOR CLEANING SEMICONDUCTOR

摘要

PURPOSE: A bubble jet shower module for cleaning a semiconductor is provided to prevent a phenomenon of flowing backward of water by forming a branch box and a module with one body and installing a spring in the inside of the module. CONSTITUTION: A plurality of nozzles(54) are formed on one side of a bed. An air supply path(56) is formed on an upper portion of the bed. A water supply path(58) is formed on a lower portion of the bed. The nozzle(54) is formed with a pressure plate(62), a guide bar(63), a pressure spring(64), an exhaust path(66), and a nozzle hole(68). The pressure plate(62) is used for stopping a connecting hole(60) between the air supply path(56) and the water supply path(58). The guide bar(63) is used for supporting the pressure plate(62). The pressure spring(64) is used for opening the connecting hole(60). The exhaust path(66) is used for exhausting water and air. The nozzle hole(68) is used for injecting a mixture of water and air.