| 摘要 |
PROBLEM TO BE SOLVED: To cut processing liquid supplied to a substrate being processed on a carrying path laid in the horizontal direction from the substrate efficiently in a short time. SOLUTION: When a substrate G reaches a specified position on a carrying path 108, rotation of a carrying roller 138 is interrupted to stop the substrate G. A drive section 188 is operated immediately thereafter to elevate an elevating/lowering shaft 186. Consequently, a base plate 182 and a lift pin 184 are raised too, and the substrate G is pushed up by the lift pin 184 above the carrying path 108. Subsequently, the base plate 182 is turned rearward at a specified angle about a shaft 196 extending in the widthwise direction of the carrying path 108. Consequently, a lift pin 192, a stopper member 194, and the substrate G incline rearward by the same angle on the carrying path 108. The substrate G is received by the stopper member 194 and liquid Q on the substrate G slips gravitationally rearward on the inclining face of the substrate and drops to the outside of the substrate. The liquid Q dropped from the substrate G is received in a pan 130. |
