APPARATUS FOR TRANSFERRING SEMICONDUCTOR WAFER

摘要

PURPOSE: An apparatus for transferring a semiconductor wafer is provided to transfer stably a wafer and prevent a damage of the wafer by changing an incline of a robot chuck according to an incline state of the wafer. CONSTITUTION: A robot is elevated and rotated according to a control signal. A robot arm(20) is installed at the robot. The robot arm(20) is moved to a horizontal direction according to the control signal. A robot chuck(12) is installed at an end portion of the robot arm(20). The robot chuck(12) is closely contacted with a bottom face of a wafer(W) by operations of the robot and the robot arm(20). An angle control portion(24) is installed to control an angle of the robot chuck(12) according to an angle control signal. A transfer portion is formed with the robot, the robot arm(20), and the angle control portion(24). The transfer portion is controlled by a controller.