| 摘要 |
PROBLEM TO BE SOLVED: To detect crossing of the wiring on different wiring layers, determine and search the location of short circuit error and permit to search for a plurality of short circuit error locations in relation with the layout inspection method. SOLUTION: The layout inspection method and apparatus are provided with short circuit error extracting means that search for short circuit errors, wiring direction inspection means, detection means for individual wiring layers and short circuit error composing means. Therefore they can exclude connectionless wiring and add wiring direction data to short circuit errors by inspecting even the wiring layer on which a short circuit error occurs, searching even the layout data that have short circuit errors at a plurality of locations and searching for short circuit errors of individual wiring layers.
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