| 发明名称 |
METHOD AND DEVICE FOR PROCESSING IMAGE DATA AND WAFER APPEARANCE INSPECTING DEVICE |
| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the necessity of clock phase control when transmitting image data in an image processor. SOLUTION: On the basis of a clock signal transmitted together with the image data of a detected image, the image data are written in a data holding part. |
| 申请公布号 |
JP2003006632(A) |
申请公布日期 |
2003.01.10 |
| 申请号 |
JP20010192154 |
申请日期 |
2001.06.26 |
| 申请人 |
HITACHI LTD |
发明人 |
ICHIGE ATSUSHI;SOEDA HIDEKI;HAYASHI KAZUYA;FUJISAWA TAKAKO;TANAKA SHIGEYA;YASUKOCHI MASAYA |
| 分类号 |
H01L21/66;G06T1/00;G06T1/60 |
主分类号 |
H01L21/66 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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