发明名称 THIN FILM TRANSISTOR AND DISPLAY USING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a thin film transistor, a liquid crystal display and an electroluminescent display, all superior in AC reliability. SOLUTION: The thin film transistor is manufactured with a lower etching rate of a gate insulation film on a source and drain regions than that of the gate insulation film on a channel region.</p>
申请公布号 JP2003007719(A) 申请公布日期 2003.01.10
申请号 JP20010187705 申请日期 2001.06.21
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KITAMURA KAZUKI;YAMAMOTO MUTSUMI
分类号 G02F1/1368;G09F9/30;G09F9/35;H01L21/336;H01L27/32;H01L29/786;H01L51/50;H05B33/14;H05B33/26;(IPC1-7):H01L21/336;G02F1/136 主分类号 G02F1/1368
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