发明名称 PROCESSING METHOD AND PROCESSOR
摘要 <p>PROBLEM TO BE SOLVED: To easily set a notch of a work to be processed at the arbitrary angle by vessel, and to process the works in the plural vessels on the same holder in the state that the position of notches are altered by vessel. SOLUTION: The method includes a process of rotating the works W which have the notch 1 on its edge by a driving shaft 11 in the state that the works W are stored in the vessel 2, and after arraying the notches 1 by engaging the notches 1 with the driving shaft 11, the arbitrary angle of the notches is set by dislocating the location of the driving shaft 11 and re-rotating the work W. After this process, the processor has the other process that perform the specified process on the works W on a holder 54 in the state that the works W are mounted after altering the position of the notch 1 by vessel, from the vessel 2 to the holder 54 on which many works W can be mounted.</p>
申请公布号 JP2003007807(A) 申请公布日期 2003.01.10
申请号 JP20010192109 申请日期 2001.06.26
申请人 TOKYO ELECTRON LTD 发明人 ENDO MASAKI;SUGAWARA MOICHI;TODA TETSUYA;ADACHI SHUJI
分类号 H01L21/68;H01L21/02;H01L21/205;H01L21/673;H01L21/683;(IPC1-7):H01L21/68 主分类号 H01L21/68
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