发明名称 ADHESIVE SHEET FOR DICING AND METHOD OF MANUFACTURING CUT CHIP
摘要 PROBLEM TO BE SOLVED: To provide a dicing adhesive sheet for fixing various kinds of works to be cut by dicing, such as semiconductor components which prevents chipping in dicing and a method of manufacturing cut products of various kinds of works, such as semiconductor components by dicing with use of the dicing adhesive sheet. SOLUTION: The adhesive sheet comprises a viscoelastic layer (A), hardened on at least one side of a base film by an energy beam incident on the base film and an adhesive layer (B), laminated on the viscoelastic layer (A).
申请公布号 JP2003007646(A) 申请公布日期 2003.01.10
申请号 JP20010183340 申请日期 2001.06.18
申请人 NITTO DENKO CORP 发明人 MATSUMURA TAKESHI
分类号 C09J7/02;C09J4/00;C09J133/00;H01L21/301;(IPC1-7):H01L21/301 主分类号 C09J7/02
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