发明名称 FLASH RADIATION DEVICE AND HEAT TREATMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a flash radiation device which is equipped with flash discharge lamps and is capable of uniformly heating the surface of a work up to high temperatures, even if the work has a large processed surface and a heat treatment device using the same. SOLUTION: This flash radiation device irradiates a work with flashing light radiated from the flash discharge lamps by actuating flash discharge lamps at the same time. Provided that the period, from the time drive signals are transmitted from a drive signal generator to the flash discharge lamp to a certain time when the time integrated value of the power consumption of the flash discharge lamp amounts to 80% of the total power consumption of the flash discharge lamp, is represented by an effective radiation time, effective radiation time difference among all the flash discharge lamps is set equal to 4 ms or shorter. A heat treatment device is equipped with a chamber, in which works are arranged and the above flash radiation device which irradiates the works arranged in the chamber with flashes.
申请公布号 JP2003007632(A) 申请公布日期 2003.01.10
申请号 JP20010188152 申请日期 2001.06.21
申请人 USHIO INC 发明人 OOWADA TATSUSHI;NAKAJIMA AKINOBU
分类号 H01L21/26;(IPC1-7):H01L21/26 主分类号 H01L21/26
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