| 摘要 |
PROBLEM TO BE SOLVED: To provide deviated position calculation technology with which the deviated position of an object to be inspected can be calculated at high speed. SOLUTION: This deviated is provided with a master image memory 12 for storing master image data M, an inspection image memory 11 for storing inspection image data T, a residual feature value calculating part 23 for comparing the master image data M with part of the inspection image data T and calculating a residual feature value between these data, a comparing position pointer 14 for storing a position where the master image data M are compared with one part of the inspection image data T, a pre-search part 24 for calculating the comparing position at which the residual feature value becomes a minimum residual feature value as a pre-minimum position by skipping and updating the value of the comparing position pointer 14 within the area of all the range of the inspection image data T, and main search part 25 for calculating a comparing position at which the residual feature value becomes the minimum residual feature value as a deviated position by successively updating the comparing position pointer 14 within the main search area of a narrow range with the pre-minimum position as a center.
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