PUMP SYSTEM FOR FABRICATING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A pump system for fabricating a semiconductor device is provided to prevent the inflow of byproducts stacked in the inside of an exhaust line into a pump in a consolidation process of the exhaust line. CONSTITUTION: A turbo molecular pump(140) and a dry pump(150) are connected with a process chamber(110). A throttle valve(160) and the first high vacuum valve(170) are installed on a vacuum line for connecting the process chamber(110) with the turbo molecular pump(140). The throttle valve(160) is used for controlling an opening state or a closing state of the vacuum line to maintain a degree of vacuum. A fore-line valve(180) is installed at a connecting line for connecting the turbo molecular pump(140) with the dry pump(150). An exhaust line(190) is used for exhausting the remaining gases from the inside of the supply line(120). The first air valve(200) is installed on the supply line(120). The second air valve(210) is installed on the exhaust line(190). The second high vacuum valve(220) is installed at the supply line(120) adjacent to the dry pump(150).