发明名称 METHOD FOR MANUFACTURING COMPOUND SOLAR BATTERY
摘要 <p>PROBLEM TO BE SOLVED: To provide a method capable of manufacturing a superstraight type compound solar battery capable of realizing a high conversion efficiency. SOLUTION: The method for manufacturing the compound solar battery comprises a step of sequentially forming a transparent conductive film 2, a buffer layer 3, a light absorption layer 4 and a rear surface electrode 5 on a transparent substrate 1. In this method, a substrate temperature is set to 400 deg.C or higher, and the absorption layer 4 made of a group I-III-VI2 compound and the buffer layer 3 made of a group II-III2 -VI4 compound are continuously formed in the same apparatus by a vapor deposition process. The absorption layer 4 is made typically of a compound containing Cu, In and Se. The buffer layer 3 is constituted of the group I-III2 -VI4 compound, and hence crystallinity of the absorption layer can be improved.</p>
申请公布号 JP2003008039(A) 申请公布日期 2003.01.10
申请号 JP20010192986 申请日期 2001.06.26
申请人 SHARP CORP 发明人 OTAKE YASUTOSHI
分类号 C23C14/06;H01L21/205;H01L31/04;(IPC1-7):H01L31/04 主分类号 C23C14/06
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