VACUUM DEPOSITION APPARATUS FOR EL DISPLAY DEVICE USING THERMAL MEDIUM SOURCE

摘要

PURPOSE: A vacuum deposition apparatus for EL display device using a thermal medium source is provided to heat and deposit a sample within a vacuum chamber by using a thermal fluid circuit and a thermal medium source. CONSTITUTION: A shutter(51) is installed in the inside of a chamber(50). A plurality of thermal medium sources(H) are formed at a lower portion of the chamber(50). The thermal medium sources(H) are connected with a thermal medium circulation circuit to circulate and heat a heating medium(LF). The thermal medium sources(H) have a deposition slit(60). A sample is loaded into a sample loading portion(61). A slit nozzle portion is installed to control an interval(d) of the depositing slit(60). A circulation pass(62) is arranged in the inside of the thermal medium sources(H). A fluid pipe is used for connecting the thermal medium sources(H) with a heating tank.