| 摘要 |
PURPOSE: A band-pass filter is provided to be capable of implementing MEMS(Micro ElectroMechanical System) technology by using an electrostatically coupled micro-resonator as a filter. CONSTITUTION: An electromechanical band-pass filter fabricated on a substrate(36) includes the first and second masses, each mass being independently movable in a common direction relative to the substrate(36) and to other mass. The first spring element(33) has one end attached to the substrate(36) and the other end attached to the first mass(32). The second spring element(39) has one end attached to the first mass(32) and the other end attached to the second mass(38). An input transducer(40,42) is provided for receiving an input frequency and applying a force to the first mass(32) in the direction of motion of the first mass(32), the force being representative of the input frequency. An output transducer(48,49) is associated with the first and second masses for providing and output frequency representative of the relative motion between the first and second masses.
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