发明名称 Method of monitoring a production process
摘要 The invention relates to a method for monitoring a manufacturing process, which by using a linear combination of measured variables with judiciously chosen weighting, produces a suitable (optimal) signal for determining each parameter. The extraction of the parameters from the measured variables is thus greatly simplified and in many cases becomes actually possible for the first time. According to the invention, large amounts of data may now be prepared, such that the crucial information (parameters) can be obtained from the data, almost in real time, or in real time.
申请公布号 US2003008507(A1) 申请公布日期 2003.01.09
申请号 US20020205080 申请日期 2002.07.25
申请人 BELL FERDINAND;KNOBLOCH DIRK;VOIGTLANDER KNUT;ZIMPEL JAN 发明人 BELL FERDINAND;KNOBLOCH DIRK;VOIGTLANDER KNUT;ZIMPEL JAN
分类号 G01N21/25;H01L21/66;(IPC1-7):H01L21/461 主分类号 G01N21/25
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