申请人 |
INFINEON TECHNOLOGIES AG;MATTSON THERMAL PRODUCTS GMBH;FRIGGE, STEFFEN;KEGEL, WILHELM;SACHSE, JENS-UWE;STADTMUELLER, MICHAEL;HAYN, REGINA;ROTERS, GEORG;SCHOER, ERWIN;STORBECK, OLAF |
发明人 |
FRIGGE, STEFFEN;KEGEL, WILHELM;SACHSE, JENS-UWE;STADTMUELLER, MICHAEL;HAYN, REGINA;ROTERS, GEORG;SCHOER, ERWIN;STORBECK, OLAF |