Method for machining micro grooves of dynamic pressure pneumatic bearing

摘要

A method for forming and polishing micro grooves in a dynamic pressure pneumatic bearing at a short time by employing the electrolytic polishing process and the micro electrolytic machining process is disclosed. The method comprises the step of forming a plurality of micro grooves in a surface of the bearing using an electrochemical electrolytic polishing process and, an electrolytic machining process.