| 发明名称 |
METHOD AND DEVICE FOR SEPARATING MEMBER |
| 摘要 |
PURPOSE: To properly separate a composite substrate independent of distortion of the composite substrate, etc. CONSTITUTION: The separating device is provided with a position adjusting mechanism 140 for adjusting the position of a nozzle 120 to jet a fluid. According to the program which is preset considering that the composite substrate has a distortion within a prescribed limit, the position adjusting mechanism 140 changes the height of the nozzle 120 stepwise to separate a composite substrate 50.
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| 申请公布号 |
KR20030003112(A) |
申请公布日期 |
2003.01.09 |
| 申请号 |
KR20020037374 |
申请日期 |
2002.06.29 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
FUJIMOTO AKIRA;KOHDA MITSUHARU;SAKAGUCHI KIYOFUMI;YANAGITA KAZUTAKA |
| 分类号 |
H01L21/00;H01L21/02;H01L21/306;H01L21/336;H01L21/68;H01L21/762;H01L27/12;H01L29/786;(IPC1-7):H01L27/12 |
主分类号 |
H01L21/00 |
| 代理机构 |
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