发明名称 |
SUBSTRATE CONTAINER, SUBSTRATE CONVEYING SYSTEM AND GAS REPLACEMENT METHOD |
摘要 |
PURPOSE: To replace atmosphere within an entire substrate container efficiently in a short time. CONSTITUTION: Deflection means for deflecting the inflow of gas is provided so as to flow gas into the substrate container from a gas inset provided in the substrate container, which is capable of containing the substrate, and replace an atmosphere within the substrate container.
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申请公布号 |
KR20030002996(A) |
申请公布日期 |
2003.01.09 |
申请号 |
KR20020029446 |
申请日期 |
2002.05.28 |
申请人 |
SEMICONDUCTOR LEADING EDGE TECHNOLOGIES, INC. |
发明人 |
TOKUNAGA KENJI |
分类号 |
B65D47/06;B65D85/86;H01L21/673;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
B65D47/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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