| 摘要 |
A sensor head includes a first substrate provided with a light emitting element and a light receiving element, an optical structure body formed in one piece on a second substrate, the optical structure body having a plurality of optical elements intended for converging incident light in a parallel direction to a surface of the second substrate, for converging an outgoing beam from the light emitting element and a light beam reflected by an object to be measured in the parallel direction to the surface of the second substrate, and lenses intended for converging incident light in a perpendicular direction to the surface of the second substrate, for converging the outgoing beam from the light emitting element and the light beam reflected by the object to be measured in the perpendicular direction to the surface of the second substrate, respectively. Consequently, there can be provided a small-size and low-cost sensor head whose signal-to-noise ratio is improved, without having to use a three-layer waveguide with a large manufacturing cost.
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