SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR

摘要

An insulation film very low in permittivity and high in mechanical strength. A semiconductor device capable of reducing both a capacity between wiring layers and a capacity between wirings when a semiconductor device is fined and highly integrated. An inorganic insulation film, having a porous structure that has holes cyclically arranged and has a skeleton structure provided with many pores, is provided to meet the above requirements.