| 摘要 |
<p>A treating agent having the excellent ability to make a metal hydride-containing exhaust gas harmless; a process for producing the treating agent; and a method of treating the gas. The treating agent comprises a mixture of copper hydroxide or basic copper carbonate with a silicon compound or a mixture of the copper compound with the silicon compound in which part of the two compounds form a composite. It is prepared from an aqueous solution of a copper salt as a mother liquor by a precipitation method in which an aqueous solution of a mixture of an alkali hydroxide or alkali carbonate with an alkali silicate is used as a precipitant. The treating agent obtained by the process has the high ability to make a metal hydride gas harmless and is lowly exothermic. It is hence useful for the treatment of a metal hydride-containing exhaust gas which generates in semiconductor production, etc.</p> |
