| 摘要 |
An enhanced scanning probe microscope is provided with means for controlling the atmosphere surrounding the probe tip and the sample or surface to be scanned. Additional enhancements include a tip holder which can be tuned to reflect the laser light of the apparatus on the photodiode, a brace to stabilize the optical microscope relative to the sample and a mirror placed to allow visualization of the sample and tip from the side. Also provided is an enhanced method of nanolithography using an enhanced scanning probe microscope in which it is possible to control the atmosphere surrounding the probe tip and the substrate to be patterned or etched.
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