| 摘要 |
A flow rate control valve includes a rotary driving source driven by an electric signal, a first movable member screwed axially displaceably in a screw hole by a rotary action of the rotary driving source, a second movable member displaced together with the first movable member, a diaphragm connected to the second movable member, a valve seat on which the diaphragm is seated, and a first fluid port and a second fluid port to which a pressure fluid is supplied or from which the pressure fluid is discharged.
|
