SUBSTRATE APPLICATION APPARATUS, LIQUID SUPPLY APPARATUS AND METHOD OF MANUFACTURING NOZZLE

摘要

PURPOSE: A substrate application apparatus, a liquid supply apparatus and the method of manufacturing nozzle are provided to precisely supply the prescribed quantity of a coating liquid on a substrate in a substrate coating apparatus using a nozzle. CONSTITUTION: Grooves corresponding to a prescribed pattern shape to be coated with an organic EL(electroluminescent) material are formed on the substrate(S) and the organic EL material is poured from nozzles(4a-4c) in the grooves by moving the nozzles 4a-4c along the grooves. In the nozzle(4a), a nozzle main body is formed from a polyimide and a flow passage excluding a discharge port has hydrophilicity. The tip surface including a discharge port has water repellency by an ion implantation method. As a result, the discharge from the nozzle is certainly carried out and the sticking of the coating liquid to the nozzle is prevented.