COOLING SYSTEM CAPABLE OF DETECTING COOLANT LEAKAGE FROM COOLANT PATH FOR COOLING WAFER LOADING CHUCK

摘要

PURPOSE: A cooling system capable of detecting coolant leakage from coolant path for cooling wafer loading chuck is provided to inspect the cooling system and effectively perform a maintenance process by easily detecting whether the coolant leakage occurs from the coolant path. CONSTITUTION: Coolant circulates through the coolant path to cool a target material. A coolant supply unit(300) supplies the coolant to the coolant path. The first pressure gauge(401) detects the pressure of the coolant, installed in the inlet of the coolant path through which the coolant is induced from the coolant supply unit. The second pressure gauge(403) detects the pressure of withdrawn coolant so that the pressure of the withdrawn coolant is compared with the pressure detected by the first pressure gauge, installed in the outlet of the coolant path through which the circulated coolant is withdrawn from the coolant supply unit.