Inherently stable electrostatic actuator technique which allows for ful gap deflection of the actuator

摘要

A electrostatic sensing device for sensing a voltage from a electrostatic device, includes a first actuator having a first membrane and a first electrode, the first membrane being moveable and a second actuator having a second membrane and a second electrode, the second membrane being moveable. Additionally, a control device controls the first actuator and the second actuator to alternatively charge the first actuator with a first charge and the second actuator with a second charge, and a circuit outputs a first voltage linearly based on the first charge and a second voltage linearly based on the second charge.