发明名称 |
High-sensitivity optical scanning using memory integration |
摘要 |
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report. |
申请公布号 |
US2003006364(A1) |
申请公布日期 |
2003.01.09 |
申请号 |
US20020176003 |
申请日期 |
2002.06.21 |
申请人 |
ORBOTECH LTD. |
发明人 |
KATZIR YIGAL;GUR-ARIE ITAY;MALINOVICH YACOV |
分类号 |
G01N21/88;G01N21/89;G01N21/956;G06T1/00;G06T1/60;H01L27/14;H01L27/146;H04N5/374;(IPC1-7):H01L27/00 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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