发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PURPOSE: To provide a semiconductor device capable of forming a pocket area by using indium and decreasing the increase of leak current by ion injection of indium. CONSTITUTION: The semiconductor device has first and second active areas demarcated on the main surface of a silicon substrate, a first n channel MOS transistor formed on the first active area having a first extension area and a first pocket area adding the indium of first concentration at a position deeper than the first extension area, and a second n channel MOS transistor formed on the second active area having a second extension area and a second pocket area adding the indium of second concentration lower than the first concentration at another position deeper than the second extension area. Furthermore, boron may be ion-injected in the second pocket area.
申请公布号 KR20030003074(A) 申请公布日期 2003.01.09
申请号 KR20020036800 申请日期 2002.06.28
申请人 FUJITSU LIMITED 发明人 OKABE KENICHI;WADA HAJIME;WATANABE KOU
分类号 H01L29/78;H01L21/265;H01L21/8234;H01L27/088;H01L29/10;(IPC1-7):H01L21/265 主分类号 H01L29/78
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