发明名称 GAS DISSOLVED WATER PRODUCING APPARATUS AND METHOD THEREOF FOR USE IN ULTRASONIC CLEANING EQUIPMENT
摘要 The object of the present invention is to provide a gas dissolved water producing apparatus which can produce a gas dissolved water (31) having a concentration of a dissolved solution gas (3) not greater than a saturated concentration rapidly and efficiently. The apparatus comprises a gas dissolving section (11), a gas channel (12) for guiding a gas into the dissolving section, a first water channel (13) for guiding a water into the dissolving section, a gas dissolved water discharge channel (14), and a second water channel (15) for guiding the water without passing through the dissolving section. The second water channel (15) joins the gas dissolved water discharge channel (14) to control the solution gas dissolved in the gas dissolved water can be controlled to a prescribed level of concentration.
申请公布号 WO02085790(A3) 申请公布日期 2003.01.09
申请号 WO2002JP03819 申请日期 2002.04.17
申请人 EBARA CORPORATION;OZAWA, SUGURU;SHINJO, RYOICHI;HARADA, MINORU;SAITO, TAKAYUKI;SASAKI, KENICHI;MURAKAWA, KEIICHI;SHIMAMURA, KAZUHIDE 发明人 OZAWA, SUGURU;SHINJO, RYOICHI;HARADA, MINORU;SAITO, TAKAYUKI;SASAKI, KENICHI;MURAKAWA, KEIICHI;SHIMAMURA, KAZUHIDE
分类号 B01F1/00;B01D53/22;B01D61/00;B01F3/04;B01F15/04;C02F1/36;C02F1/44;C02F1/68;C02F1/74;C02F1/78;H01L21/00 主分类号 B01F1/00
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