| 摘要 |
PROBLEM TO BE SOLVED: To rapidly form uniform hard carbon films on sliding parts, such as bearings, used for magnetic disk recording devices and optical disk recording devices. SOLUTION: In constituting the apparatus for forming the hard carbon films which forms the hard carbon films by a plasma enhanced CVD system, a supporting electrode 8 for supporting a conductive base material 6 for deposition is installed within a vacuum chamber 1 connected to an exhauster 10 and a gas supply source 11 for supplying gaseous film material G into the chamber and a power source 4 for impressing a voltage between the vacuum chamber 1 and the supporting electrode 8 are connected to each other. The vacuum chamber 1 is constituted to have an outer peripheral surface 6a which is the surface to be deposited with the film of the base material 6, an inside surface shape, i.e., an inner peripheral surface 1c resembling an end face 6b and a top surface 1d and to form an equal spacing from the surface to be deposited with the film. As a result, the hard carbon films can be simultaneously formed on the outer peripheral surface 6a and end face 6b of the base material 6 and the time required for obtaining the prescribed vacuum degree can be shortened. The uniform hard carbon films can be formed by maintaining the gas density, plasma density, etc., between the vacuum chamber 1 and the surface to be deposited with the film of the base material 6 constant.
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