| 摘要 |
PROBLEM TO BE SOLVED: To improve the insulating property, the strength and the flatness of a low temperature fired ceramic substrate by restriction firing. SOLUTION: Green sheets 12 for restriction, which are not sintered at a sintering temperature of a low temperature firing green substrate 11, are laminated on both surface of the green substrate 11 and restriction-fired at 800-1000 deg.C, and then the green sheets 12 is removed. A resin having a lower pyrolysis temperature than that of a binder of the green substrate 11 is used as a binder of the green sheet 12. As a result, the binder of the green sheet 12 begins thermal pyrolysis to make the green sheet 12 porous before the binder of the green substrate 11 begins the thermal pyrolysis after the firing starts. Then, a gas produced by the pyrolysis of the binder of the substrate 11 is passed through the porous green sheet 12 and is discharged to the outside to prevent the gas produced by the pyrolysis from being confined in the substrate 11. |
