发明名称 POSITIONING TABLE AND METHOD FOR CONTROLLING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a positioning table capable of being accurately positioned. SOLUTION: A slide plate 1 is supported slidably by a rail 3 and a guiding mechanism 4 with respect to a base 2. A spirally threaded mechanism 7 rotated by a motor 5 is provided on the base 2. A thread block 9 having female threads or female threads of the mechanism is provided on the plate 1 to slidably move the plate 1 by a rotation of the mechanism 7. A cylinder 10 is provided to apply a preload to the plate 1, and hence a predetermined preload is always applied to the plate 1 in one direction without respect to the position of the plate 1.
申请公布号 JP2003004880(A) 申请公布日期 2003.01.08
申请号 JP20010187165 申请日期 2001.06.20
申请人 SONY CORP 发明人 TAKACHI TAIZO
分类号 G12B5/00;B23Q5/40;G05D3/12;(IPC1-7):G12B5/00 主分类号 G12B5/00
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