| 摘要 |
PURPOSE: Provided are a zoom lens array which can form quadrupole illumination and easily change an angle of the quadrupole illumination without using existing diffractive optical element, and an exposure device having the same. CONSTITUTION: The zoom lens array comprises a zoom lens(221) which forms an annular illumination(222) from laser beam(210) projected from a light source; and a variable blade unit(223), which is positioned at the top of the zoom lens(221) and has a plurality of variable blades(223A-223E), and which blocks light of the annular illumination input from the zoom lens(221) with any one(223A) of the variable blades and forms a quadrupole illumination having predetermined angle. A sigma value of the annular illumination is determined by the zoom lens(221). |
